Andrey Evgenievich Komlev
PhD, Associate professor, St.-Petersburg Electrotechnical University «LETI»
Physical and chemical basics of the technology of electronic and nanoelectronic devices
Electrotechnical University
About
This online course is devoted to the study of the physical and chemical principles underlying technological methods for the production of materials and processes used in the manufacture of modern electronic devices.
The theoretical basis of the discipline is the main sections of chemical thermodynamics of heterogeneous systems and solid solutions, diffusion kinetics, theory of point defects in crystal phases, theory of surface phenomena, interphase interactions and nanobject formation.
A complete study of these sections makes it possible to define requirements for technological methods and to determine conditions for controlling the composition and electrophysical properties of electronic engineering materials and nanostructures that are based on them.
Structure
- Module 1. Introduction
- Entropy and its properties
- Conditions of phase and chemical equilibrium
- Conditions of phase and chemical equilibrium in systems with charged particles
- The law of conservation of energy in open systems
- Types of thermodynamic processes
- Thermal effect and entropy of irreversible processes
- The conditions of spontaneity of isothermal processes in open systems
- Basic thermodynamic functions and relations between them
- Chemical potential and its properties
- Thermodynamic functions of an nonviscous gas
- Standard state of substances and tables of standard thermodynamic quantities
- Module 2. Control of phase transformations of substances
- Phase transformations in one-component systems
- Saturated vapour pressure of a pure substance
- Models and thermodynamic properties of solutions
- Theory of regular solutions
- Saturated vapor pressure over solutions and mixtures of substances in a condensed state
- Molecular and atomic solubility of gases in condensed media
- Equilibrium of liquid and solid phases in one-component and binary systems
- Fusion diagram of binary systems without solid solutions
- Fusion diagrams of binary systems with unlimited solid solution
- Fusion diagrams of binary systems with limited solid solutions
- Fusion diagrams of binary systems with chemical compounds in the solid phase
- Module 3. Control of chemical transformations of substances
- Types of chemical reactions
- Mass action law and chemical equilibrium constants
- Direction of a chemical reaction
- Le Chatelier's principle
- Gas transporting chemical reactions
- Practical application of gas transport chemical reactions
Authors